"

Cookies ussage consent

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

I agree, do not show this message again.

MEMS structures characterization on PMMA layer using KrF excimer laser micromachining

S. SAADON1,2,* , Y. WAHAB1, A. T. GUANG1,2

Affiliation

  1. Advanced Multi-Disciplinary MEMS-Based Integrated NCER Centre of Excellent (AMBIENCE),
  2. School of Microelectronic Engineering (SoME), Universiti Malaysia Perlis (UniMAP), Malaysia

Abstract

This paper presented the study of MEMS structures characterization on PMMA layer by using the 248nm Krypton Fluoride (KrF) excimer laser micromachining. To study surface quality of PMMA, the microdrilling process was carried out to produce the holes. By using the KrF excimer laser, the relationship between the ablation parameter and the size of the holes was investigated. To further confirm the relationship between ablation parameters and the surface quality, several microchannels of the microfluidic structures were fabricated by varying the energy and frequency in order to obtain the optimize parameters. The width of the microchannels increased when the energy increased. After the micromachining process, the microchannels were fabricated again by different beam size. The increment in beam size caused the width of the microchannel to be increased. The physical deformation of the holes and the microchannel were observed by using the High Power Optical Microscope..

Keywords

Micromachining, Microdrilling,; MEMS Structures, Microchannels.

Submitted at: Aug. 17, 2015
Accepted at: Sept. 9, 2015

Citation

S. SAADON, Y. WAHAB, A. T. GUANG, MEMS structures characterization on PMMA layer using KrF excimer laser micromachining, Journal of Optoelectronics and Advanced Materials Vol. 17, Iss. 9-10, pp. 1265-1271 (2015)