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B. PEČAR1,* , H. URŠIČ2, B. MALIČ2, M. MOŽEK1, D. VRTAČNIK1
- University of Ljubljana, Faculty of Electrical Engineering, Laboratory of Microsensor Structures and Electronics, Tržaška 25, SI-1000 Ljubljana, Slovenia
- Electronic Ceramics Department, Jožef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia
The microcylinder pumps employing piezoelectric actuators based on relaxor-ferroelectric 0.57Pb(Sc1/2Nb1/2)O3–0.43PbTiO3 are fabricated and characterized. The prototypes with 6 mm chamber diameter and with a modified outlet rectifying element feature high water / air flowrate performance (up to 1 ml min-1 / up to 3.8 ml min-1) and backpressure performance (up to 215 mbar / up to 65 mbar) at the excitation amplitude of 130 V. To our knowledge, it is the first time the relaxor-ferroelectric material has been employed in a piezoelectric micropump application..
Micropump, Microcylinder pump, Relaxor based material, PSN-PT, Excitation amplitude.
Submitted at: June 17, 2017
Accepted at: Oct. 10, 2017
B. PEČAR, H. URŠIČ, B. MALIČ, M. MOŽEK, D. VRTAČNIK, Microcylinder pump employing 0.57Pb(Sc1/2Nb1/2) O3–0.43PbTiO3 piezoelectric actuator, Journal of Optoelectronics and Advanced Materials Vol. 19, Iss. 9-10, pp. 617-622 (2017)
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