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Modeling of thin film bulk acoustic wave resonators and ladder-type filter design

CHEN YEONG-CHIN1

Affiliation

  1. Department of Computer Science & Information Engineering, Asia University, 500 Liufeng Rd., Wufeng,Taichung 41354,Taiwan

Abstract

In this paper, PSPICE is implemented to model and simulate the characteristic of thin film bulk acoustic resonator (FBAR). Both analogy equivalent circuits of Acoustic transmission line and Mason model is proposed and transferred to the PSPICE model by using the controlled-source method. The physical parameters such as piezoelectric materials and its thickness, electrode material, area and its thickness affecting the properties of the FBAS are discussed. Finally, we have implemented the FBAR to design a ladder type filter with a center frequency at 1.1 GHz and bandwidth about 60.9%. The study results in that PSPICE is an effective tool for the FBAR modeling and ladder type filter design..

Keywords

Thin Film Bulk Acoustic Wave Resonator, FBAR, Resonator, Filter, PSPICE.

Submitted at: Oct. 18, 2009
Accepted at: Sept. 15, 2010

Citation

CHEN YEONG-CHIN, Modeling of thin film bulk acoustic wave resonators and ladder-type filter design, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 9, pp. 1993-1999 (2010)