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Modelling of material properties for MEMS structures

G. IONASCU1,* , C. D. COMEAGA1, L. BOGATU1, A. SANDU2, E. MANEA3, D. BESNEA1

Affiliation

  1. Mechatronics and Precision Mechanics Department, "Politehnica" University of Bucharest, Romania
  2. Department of Strength of Materials, "Politehnica" University of Bucharest, Romania
  3. National Institute for Research & Development in Microtechnology of Bucharest, Romania

Abstract

The paper presents a combined experimental and theoretical study to determine the actual dynamic Young’s modulus (Edynamic) for the mechanical structure of a silicon microaccelerometer. The resonance (natural) frequencies of the suspension arms of accelerometer were measured using MSA-500 Micro System Analyzer and, then, introduced in analytical expressions in order to find Edynamic. The obtained results were used to validate the model of numerical simulation relative to the measured resonance frequencies of analyzed MEMS accelerometer..

Keywords

MEMS structures, Silicon microaccelerometer, Resonance (natural) frequency, Dynamic Young’s modulus.

Submitted at: May 4, 2011
Accepted at: Aug. 10, 2011

Citation

G. IONASCU, C. D. COMEAGA, L. BOGATU, A. SANDU, E. MANEA, D. BESNEA, Modelling of material properties for MEMS structures, Journal of Optoelectronics and Advanced Materials Vol. 13, Iss. 8, pp. 998-1003 (2011)