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Modelling of radio-frequency breakdown in argon

I. ILIEV1, S. GOCHEVA-ILIEVA2,* , N. SABOTINOV3

Affiliation

  1. Department of Physics, Technical University Sofia - branch Plovdiv, 25 Tzanko Djusstabanov St, 4000 Plovdiv, Bulgaria
  2. Faculty of Mathematics and Informatics, Plovdiv University, 24 Tsar Assen St, 4000 Plovdiv, Bulgaria
  3. Georgi Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria

Abstract

The problem of improving the agreement between the theoretically predicted and experimentally established breakdown voltage during the optimisation of the plasma technological processes is considered. New simple modified analytical breakdown criteria are obtained for low and medium-pressure RF capacitive discharge in argon at a frequency of 13.56 MHz. These criteria are based on well known criteria and experimental data and have an implicit form as a function of the parameter pd, where p is the gas pressure and d is the electrode separation. It is shown that the obtained results are in good agreement with the experiments..

Keywords

Breakdown curve, Modified criteria, Radio-frequency discharge, Low-pressure discharge.

Submitted at: Nov. 5, 2008
Accepted at: Oct. 3, 2009

Citation

I. ILIEV, S. GOCHEVA-ILIEVA, N. SABOTINOV, Modelling of radio-frequency breakdown in argon, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 10, pp. 1392-1395 (2009)