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A. O. MATEESCU1,* , G. MATEESCU1, L. S. CRACIUN1, C. IONESCU1, I. BURDUCEA1
- Horia Hulubei National Institute of Physics and Nuclear Engineering, IFIN-HH, Magurele, 077125, Romania
This work presents the first results of the morphological and compositional investigations for the tribological coatings with monolayer and multilayer-type structure with a complex composition that was not researched yet and that was deposited by standard and reactive DC magnetron sputtering, starting from 3 basic materials: WC, TiB2 and Ti. First sample (1) is a multi-layer with pentanary composition (Ti-W-C-B-N), deposited in one set of three successively layers (TixNy/TixByNz/WxCyNz. The second sample (2) is made of one layer of three compound materials (TixNy+TixByNz+WxCyNz) with pentanary composi-tion by simultaneously magnetron sputtering. The third (3) sample is a monolayer with quaternary composition (Ti-W-C-B), obtained by simultaneously sputtering of three materials (Ti+TiB2+WC). Surface topography, roughness and section analysis of the three coating surface layers are examined by Atomic Force Microscopy (AFM) method. Composition of the three samples is investigated by the Rutherford Backscattering Spectrometry (RBS). The AFM characterizations prove that the grain size and the roughness have lower values for the coating un-doped with N2 than for the coatings deposited with N2 as reactive gas. All the samples show very fine nanostructure. RBS investigations give the composition of each deposition and prove that all the coatings are non-stoichiometric complex compounds..
Magnetron sputtering; Multilayer/monolayer; Dry lubricant/wear resistance coatings; Quaternary/pentanary composition; AFM; RBS.
Submitted at: May 4, 2015
Accepted at: Oct. 28, 2015
A. O. MATEESCU, G. MATEESCU, L. S. CRACIUN, C. IONESCU, I. BURDUCEA, Morphological and compositional investigations of the tribological coatings with quaternary & pentanary com-position, obtained from WC, TiB2 and Ti by DC standard & reactive magnetron sputtering, Journal of Optoelectronics and Advanced Materials Vol. 17, Iss. 11-12, pp. 1767-1771 (2015)
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