"

Cookies ussage consent

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

I agree, do not show this message again.

Nano-sized silicon oxide, thermally grown on plasma hydrogenated silicon♣

S. ALEXANDROVA1,* , A. SZEKERES2

Affiliation

  1. Department of Applied Physics, Technical University, 8 Kl. Ohridski Blvd., 1797 Sofia, Bulgaria
  2. Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria

Abstract

Oxide layers (~10 nm) grown on rf plasma hydrogenated (100) and (111)Si by thermal oxidation at 850oC are studied using C-V and G-V measurement techniques, spectroscopic ellipsometry and atomic force microscopy. Analysis of the G-V curves revealed the interface traps as single-type defects. In oxides on (111)Si, a triplet Pb centre was found. Higher trap densities were observed for (100)Si. Defects in the Si sub-surface region modified during hydrogenation were detected in the high-frequency range of 200 kHz of the G-V curves, and were related to a stressed surface region in the Si substrate. The grown oxide is probably SiOx, x being dependant on pre-oxidation cleaning. The inter-silicon distance for hydrogenated oxides is about 3.07Å, which suggests a relaxed SiO2 structure. Hydrogenation of Si at 300oC suppresses the formation of defects. It is suggested that Si hydrogenation has the potential for surface engineering control..

Keywords

Silicon oxide, Hydrogenation, Hydrogen plasma, Interface and bulk defects.

Submitted at: Nov. 5, 2008
Accepted at: Sept. 9, 2009

Citation

S. ALEXANDROVA, A. SZEKERES, Nano-sized silicon oxide, thermally grown on plasma hydrogenated silicon♣, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 9, pp. 1284-1287 (2009)