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Nanomechanical and nanotribological characterization of microelectromechanical system

M. PUSTAN1,2,* , R. MULLER3, J.C. GOLINVAL1

Affiliation

  1. Department of Aerospace and Mechanical Engineering, University of Liege, Chemin des Chevreuils 1, B-4000 Liege, Belgium
  2. Department of Machine Elements and Tribology, Technical University of Cluj-Napoca, Muncii Str. 101-103, Ro-400641 Cluj-Napoca, Romania
  3. National Institute for Research and Development in Microtechnologies IMT- Bucharest, Erou Iancu Nicolae Str. 126A Ilfov - Voluntari, Ro-077190, Romania

Abstract

Investigations of the mechanical and tribological properties of microelectromechanical system (MEMS) components on nanoscale can provide insights into failure mechanism of material. The main goal of this paper is focused on the mechanical and tribological characterizations of MEMS mechanical components in order to improve their reliability design. The mechanical properties of interests are stiffness, modulus of elasticity, stress, strain. Dynamical investigations are performed to analyze the resonant frequency response, velocity and amplitude of oscillations of electrostatically actuated microcomponents and to estimate the quality factor. Finite element analysis is used to validate the experimental results of mechanical properties and to simulate the dynamical behaviour of investigated microcomponents. Tribological investigations are developed to estimate the stiction and friction. Testing and the individual characterization of MEMS materials and structures, performed using advanced equipments such as atomic force microscope and optical vibrometer analyzer are presented..

Keywords

Flexible microcomponents, Stiffness, Frequency response, Quality factor, Friction and Stiction.

Submitted at: Sept. 8, 2011
Accepted at: April 11, 2012

Citation

M. PUSTAN, R. MULLER, J.C. GOLINVAL, Nanomechanical and nanotribological characterization of microelectromechanical system, Journal of Optoelectronics and Advanced Materials Vol. 14, Iss. 3-4, pp. 401-412 (2012)