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Nanostructured PZT type thin films prepared by thermionic vacuum arc method

D. RASLEANU1, V. IONESCU1, G. PRODAN1, V. CIUPINA1,* , C. P. LUNGU2, C. SURDU-BOB2, M. OSIAC1, O. POMPILIAN2, M. BADULESCU2, A. M. LUNGU2, C. TICOS2, V. ZAROSCHI2, L. TRUPINA3, C. MICLEA3

Affiliation

  1. Ovidius University, Constanţa, 900527, Romania
  2. National Institute for Laser, Plasma and Radiation Physics, Magurele, 077125, Romania
  3. National Institute for Materials Physics, Magurele 077125, Romania

Abstract

PZT type films were prepared using the thermionic vacuum arc (TVA) method; a crucible filled PZT type powder (PbO/ZrO/TiO) was heated by a thermo-electron beam emitted by the circular cathode of the TVA gun. Applying high voltage potential (3000 ± 200V) on the anode from a regulated HEINZINGER high voltage power supply the thermoelectrons were accelerated toward the anode crucible, evaporating the anode materials and initiating a plasma discharge. The morphology and the structure of the prepared films analyzed by transmission electron microscopy, (TEM), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy, showed nanostructured, smooth thin films with specific PZT stoichiometry..

Keywords

PZT, Perovskite, Thin films, XPS, TEM, AFM.

Submitted at: Oct. 1, 2008
Accepted at: Nov. 11, 2008

Citation

D. RASLEANU, V. IONESCU, G. PRODAN, V. CIUPINA, C. P. LUNGU, C. SURDU-BOB, M. OSIAC, O. POMPILIAN, M. BADULESCU, A. M. LUNGU, C. TICOS, V. ZAROSCHI, L. TRUPINA, C. MICLEA, Nanostructured PZT type thin films prepared by thermionic vacuum arc method, Journal of Optoelectronics and Advanced Materials Vol. 10, Iss. 11, pp. 3041-3047 (2008)