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Plasma modification of nanosphere lithography masks made of polystyrene beads

D. GOGEL1, M. WEINL1,2, J. K. N. LINDNER1,2,3, B. STRITZKER1

Affiliation

  1. University of Augsburg, Institute of Physics, 86135 Augsburg, Germany
  2. University of Paderborn, Department of Physics, 33098 Paderborn, Germany
  3. CeOPP Center for Optoelectronics and Photonics, 33098 Paderborn, Germany

Abstract

Nanosphere lithography (NSL) masks consisting of mono- or double-layers of polystyrene (PS) nano-beads are fabricated on silicon exploiting the self-organization of PS particles during the controlled drying of a colloidal suspension on a surface. The shape changes and shrinkage of PS sphere masks upon treatment in an air plasma are studied as a function of initial sphere size, plasma power and treatment time. The influence of several experimental parameters, including the plasma induced temperature rise, are analysed using scanning and transmission electron microscopy. It is demonstrated that a variety of new intriguing nanopatterns can be generated on silicon surfaces by the combination of NSL and plasma techniques, largely broadening the variety of patterns available so far by NSL..

Keywords

Nanosphere lithography, Polystyrene, Plasma treatment, Electron microscopy.

Submitted at: June 30, 2009
Accepted at: Feb. 27, 2010

Citation

D. GOGEL, M. WEINL, J. K. N. LINDNER, B. STRITZKER, Plasma modification of nanosphere lithography masks made of polystyrene beads, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 740-744 (2010)