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Polymer based chemical sensor array fabricated with conventional microelectronic processes

M. KITSARA1,2, D. GOUSTOURIDIS1, E. VALAMONTES3, P. OIKONOMOU1, K. BELTSIOS2, I. RAPTIS1,*

Affiliation

  1. Institute of Microelectronics, NCSR “Demokritos”, 15310, Athens, Greece
  2. Materials Science and Engineering Dept, University of Ioannina, Ioannina 45110 Greece
  3. Electronics Engineering Dept, TEI of Athens, Egaleo 12243, Greece

Abstract

A polymer array fabricated on the same substrate with conventional microelectronic processes is introduced for gas sensing applications. The process is based on photolithographic processes and takes advantage of the balance between UV exposure dose, material tone and developers used. The sensing properties of the lithographically defined films in the array were characterized for various analytes through in situ monitoring of films swelling by white light reflectance spectroscopy. The sensing responses are post processed by Principal Component Analysis and the discrimination between analytes with similar and totally different analytes is presented..

Keywords

Chemical sensors, Polymer deposition, Photolithography, Vapor sorption, Polymer swelling.

Submitted at: Jan. 4, 2010
Accepted at: May 26, 2010

Citation

M. KITSARA, D. GOUSTOURIDIS, E. VALAMONTES, P. OIKONOMOU, K. BELTSIOS, I. RAPTIS, Polymer based chemical sensor array fabricated with conventional microelectronic processes, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 5, pp. 1147-1152 (2010)