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Porous and dense ZnO films produced by femtosecond and picosecond pulsed laser deposition

A. ACHKAR1,* , P. JEDRZEJOWSKI1, A. PIGNOLET2, A. SARKISSIAN1

Affiliation

  1. Plasmionique Inc. 1650 Boul. Lionel Boulet, Varennes, Québec, Canada, J3X 1S2
  2. INRS-EMT, 1650 Boul. Lionel Boulet, Varennes, Québec, Canada, J3X 1S2

Abstract

This paper describes our preliminary results for controlling the structure of ZnO thin films grown on Si(100) at room temperature by PLD. The laser was operated at λ=810nm and pulse durations ranging from 30fs to 275ps were used. A laser fluence of 2J/cm2 was used for pulse durations of 50fs, 200fs, 1ps and 10ps, which produced porous films that were found to increase in density with increasing pulse duration. Experiments were also conducted with 7.5J/cm2 , which resulted in denser films. The areal density and the size of the droplets were found to increase with decreasing pulse duration..

Keywords

Pulsed Laser Deposition, Femtosecond, Picosecond, ZnO thin film.

Submitted at: June 22, 2009
Accepted at: Feb. 27, 2010

Citation

A. ACHKAR, P. JEDRZEJOWSKI, A. PIGNOLET, A. SARKISSIAN, Porous and dense ZnO films produced by femtosecond and picosecond pulsed laser deposition, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 646-649 (2010)