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Preparation and patterning of nanoscale hybrid materials for micro-optics

P. OBREJA1,* , D. CRISTEA1, V. S. TEODORESCU2, A. DINESCU1, A.C. OBREJA1, F. COMANESCU1, R.REBIGAN1

Affiliation

  1. National Institute for R&D in Microtechnologies (IMT-Bucharest), 126A Erou Iancu Nicolae 077190, BucharestVoluntari, Romania,
  2. National Institute of Materials Physics, PO Box MG. 7, 77125, Magurele, Bucharest, Romania

Abstract

The refractive index of organic polymers can be modified by incorporation of inorganic nanoparticles with higher or lower refractive index. The paper presents our experimental results regarding the preparation of hybrid nanocomposite films with controlled refractive index for micro-optics and integrated optics. These materials were obtained by chemical routes and sol-gel processes from commercial polymers (PMMA, PVA), metal (Ag), metal oxide nanoparticles (TiO2, ZrO2) or organic materials (Rhodamine, Alq3). The properties of these materials depend on the composition, metal/oxide concentration, particle size and dispersion homogeneity. The hybrid nanocomposite films were characterized using spectroellipsometry, UV-VIS spectroscopy, AFM, TEM and the optical properties were correlated with processing parameters. Micro/nano pattering techniques based on combination of electron beam lithography and replication techniques have been developed to obtain structures with applications in microoptics. Components like micro-lenses, diffractive optical elements and optical waveguides have been obtained and characterized using SEM and AFM..

Keywords

Nanocomposite polymers, Patterning materials, Electron beam lithography, XTEM.

Submitted at: Oct. 6, 2010
Accepted at: Oct. 14, 2010

Citation

P. OBREJA, D. CRISTEA, V. S. TEODORESCU, A. DINESCU, A.C. OBREJA, F. COMANESCU, R.REBIGAN, Preparation and patterning of nanoscale hybrid materials for micro-optics, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 10, pp. 2007-2013 (2010)