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Production and characterization of iridium oxide films by ultrasonic chemical spray pyrolysis

O. GENÇYILMAZ1,* , F. ATAY2, İ. AKYÜZ2

Affiliation

  1. Çankırı Karatekin University, Çankırı, 18100, Turkey
  2. Eskişehir Osmangazi University, Eskişehir, 26480, Turkey

Abstract

Iridium oxide films were deposited onto glass substrate at 300±5 ºC by using ultrasonic chemical spray pyrolysis technique. The as-deposited films were annealed at 600 ºC in air medium for 3 h. The effects of anneal on structural, optical, morphological and electrical properties was studied. Effects of annealed iridium oxide on the crystalline nature, morphological, optical and electrical properties of the deposited films were analyzed by using X-ray diffraction, atomic force microscopy, UV-visible spectrophotometer and two-probe method, respectively. The X-ray diffraction studies showed that unannealed iridium oxide films were non-crystalline phase (Ir2O3). At annealing temperature of 600 ºC for 3 h, the films were fully transformed to polycrystalline phase of IrO2. Also, the room temperature electrical resistivity of these films decreased and transmittance values increased with annealing process..

Keywords

Iridium oxide, Spectroscopic ellipsometry, X-ray diffraction, Atomic force microscopy, Two-probe technique.

Submitted at: Jan. 22, 2014
Accepted at: March 19, 2015

Citation

O. GENÇYILMAZ, F. ATAY, İ. AKYÜZ, Production and characterization of iridium oxide films by ultrasonic chemical spray pyrolysis, Journal of Optoelectronics and Advanced Materials Vol. 17, Iss. 3-4, pp. 395-402 (2015)