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Sensor properties of spray-pyrolysis deposited ZnO thin films

N. STARBOV1,* , E. KRUMOV1, D. KARASHANOVA1, A. RACHKOVA1, K. STARBOVA1

Affiliation

  1. Central Laboratory of Photoprocesses”Acad.Jordan Malinowski”, Bulgarian Academy of Sciences, Acad.Georgi Bonchev Str., Block 109, 1113 Sofia, Bulgaria

Abstract

Nano-sized ZnO thin films are prepared by spray-pyrolysis of Zn-acetate and Zn-nitrate onto glass substrates. Two different thermal post-processing – non-isothermal or laser annealing, are applied to improve the film microstructure and related properties. X-ray diffraction or scanning electron microscopy are used in order to identify the ZnO phase composition and film surface morphology respectively. DC-resistance measurements indicate that the electrical conductivity of the samples studied is sensitive to the presence of reactive compounds in the ambient gas atmosphere. The sensing efficiency of virgin, as well as annealed, ZnO films for the detection of ethanol, acetone, ammonia and dimethylamine is checked via resistance measurements at room temperature. The results obtained are used for calculation of the relative gas sensitivity of the samples studied. Finally, cyclic resistance measurements in a gas vapour/inert atmosphere show that either ammonia or dimethilamine vapors are simply physically adsorbed onto the ZnO film surface..

Keywords

Zinc oxide, Thin films, Electrical properties, Ambient gas sensitivity.

Submitted at: Nov. 5, 2008
Accepted at: Oct. 3, 2009

Citation

N. STARBOV, E. KRUMOV, D. KARASHANOVA, A. RACHKOVA, K. STARBOVA, Sensor properties of spray-pyrolysis deposited ZnO thin films, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 10, pp. 1375-1378 (2009)