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Simulating and modeling of three dimensional columnar growth nanosacle structure

R. S. DARIANI1,* , S. MINAEIFARD1, M. RAJABI1

Affiliation

  1. Department of Physics, Alzahra University, Tehran, 19938, Iran

Abstract

The mechanisms of nucleation and bulk growth in oblique angle deposition have recently attracted interest due to the formation of 3D columnar growth nanoscale structure. In this study, we present the results of growth simulation that explores the surface coverage of thin films during oblique angle deposition. The model is based on the deposition of incident particles directly under certain incident angle and particles surface diffusion. For computational efficiency, the potential is limited to nearest neighbor interactions. The model includes simulation of film growth from early growth stages of nucleation to later growth stages of columnar nanoscale structure..

Keywords

Nucleation, Bulk growth, Surface coverage, Incident angle, Diffusion length.

Submitted at: July 12, 2012
Accepted at: Oct. 30, 2012

Citation

R. S. DARIANI, S. MINAEIFARD, M. RAJABI, Simulating and modeling of three dimensional columnar growth nanosacle structure, Journal of Optoelectronics and Advanced Materials Vol. 14, Iss. 11-12, pp. 890-898 (2012)