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Stress study of thin As-Se-Ag films obtained by vacuum thermal evaporation and pulsed laser deposition

T. PETKOVA1,* , V. ILCHEVA1, P. PETKOV2, G. SOCOL3, C. RISTOSCU3, F. SIMA3, C. N. MIHAILESCU3, I. N. MIHAILESCU3, C. POPOV4, V. BOEV1, J. P. REITHMAIER4

Affiliation

  1. Institute of Electrochemistry and Energy Systems, Bulgarian Academy of Sciences, Acad. G. Bonchev bl.10, 1113 Sofia, Bulgaria
  2. Department of Physics, University of Chemical Technology and Metallurgy, 8 Kl. Ohridski blvd., 1756 Sofia, Bulgaria
  3. Laser-Surface-Plasma Interactions Laboratory, Lasers Department, National Institute for Lasers, Plasma and Radiations Physics, PO Box MG-54, Magurele, RO-77125, Romania
  4. Institute of Nanostructure Technologies and Analytics, University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

Abstract

Thin (As2Se3)100–xAgx (x = 0 - 25 mol.%) films have been obtained on glassy and silicon substrates by vacuum thermal evaporation and pulsed laser deposition from the corresponding bulk materials. The stress of the layers deposited on silicon cantilevers was measured by a cantilever technique, which is commonly applied to solid inorganic thin films. The correlation between the stress and the composition as a function of the film preparation methods has been investigated and discussed. We showed that the addition of silver leads to changes in the glass properties, such as an increase of the density and compactness, related to the modification of the stress values..

Keywords

Chalcogenide glasses, Thin films, Intrinsic stress.

Submitted at: June 19, 2009
Accepted at: Feb. 27, 2010

Citation

T. PETKOVA, V. ILCHEVA, P. PETKOV, G. SOCOL, C. RISTOSCU, F. SIMA, C. N. MIHAILESCU, I. N. MIHAILESCU, C. POPOV, V. BOEV, J. P. REITHMAIER, Stress study of thin As-Se-Ag films obtained by vacuum thermal evaporation and pulsed laser deposition, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 650-653 (2010)