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Template-free preparation of self-standing porous diamond films by hot filament chemical vapor deposition

H. ZHANG1, Z. BAO1, F. TENG1, P. ZHANG1, J. LI1, Z. ZHANG1,* , E. XIE1,*

Affiliation

  1. School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, People’s Republic of China.

Abstract

High quality self-standing porous diamond film was prepared by template-free hot-filament chemical vapor deposition (HFCVD) with polyvinylpyrrolidone (PVP) as auxiliary material. The micrometer sized diamond particles were used as seed layer. And it also acted as the nucleation sites for the diamond growth. The carbon source inside the film was partially supplied by the carbonized PVP. This method breaks the bottleneck of chemical vapor infiltration, and achieves the growth of new diamond layer inside the film. Due to the high concentration of atom hydrogen, the prepared diamond porous film only contains little graphite phase. This porous diamond film can be used in many fields, such as heat sinking devices, electronic devices, and so on..

Keywords

Template-free, Self-standing, Porous diamond film, Chemical vapor deposition, Diamond particles.

Submitted at: July 20, 2015
Accepted at: Nov. 25, 2016

Citation

H. ZHANG, Z. BAO, F. TENG, P. ZHANG, J. LI, Z. ZHANG, E. XIE, Template-free preparation of self-standing porous diamond films by hot filament chemical vapor deposition, Journal of Optoelectronics and Advanced Materials Vol. 18, Iss. 11-12, pp. 1040-1044 (2016)