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The influence of oxygen flow during deposition on the structural, mechanical and tribological properties of titanium oxide magnetron sputtered thin films

D. G. CONSTANTIN1, C. MOURA2, D. MUNTEANU1,* , L. CUNHA2

Affiliation

  1. Dept. of Materials Science and Engineering Transilvania University, 500036 Brasov, Romania
  2. Centro de Física, Universidade do Minho, 4710-057 Braga, Portugal

Abstract

This work reports on the study of mechanical and tribological properties of titanium oxide films produced by direct current reactive magnetron sputtering. The mechanical and tribological properties of the deposited coatings were analyzed as function of the oxygen flow rate used during the deposition process and were correlated with the structural aspects. The structural characterization results reveal a dependence of the film texture on the oxygen flow rate. The gradual increasing of oxygen flow bring the TiOx compound first in a crystalline structure variant (TiO2 - anatase preferential growth) followed further by a significant loss in crystallinity. Considering the same variation of oxygen, the mechanical properties of the films (hardness, Young modulus and adherence) generally become better in the amorphous region while the friction coefficient decreased..

Keywords

Titanium oxide, Sputtering, Structure, Hardness, Friction, Wear.

Submitted at: Aug. 14, 2012
Accepted at: Oct. 30, 2012

Citation

D. G. CONSTANTIN, C. MOURA, D. MUNTEANU, L. CUNHA, The influence of oxygen flow during deposition on the structural, mechanical and tribological properties of titanium oxide magnetron sputtered thin films, Journal of Optoelectronics and Advanced Materials Vol. 14, Iss. 11-12, pp. 964-970 (2012)