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I agree, do not show this message again.Transformations in phase-change memory material during thermal cycling
A. A. SHERCHENKOV1, S. A. KOZYUKHIN2, E.V. GORSHKOVA1
Affiliation
- Institute of Electronic Technology, Moscow, Russian Federation
- Kurnakov Institute of General and Inorganic Chemistry, RAS, Moscow, Russian Federation
Abstract
Phase transformations in bulk Ge2Sb2Te5 and its thin films during thermal cycling were studied by differential scanning calorimetry, and thermal properties were determined. Exothermal peaks due to the amorphous-fcc and fcc-hcp phase changes were observed in the thin films in the temperature ranges of 145-190 and 205-230°C, respectively. In addition, reproducible endothermic peak in the range of 390-415°C was revealed in thin films as well as in bulk Ge2Sb2Te5, which may influence the kinetics and endurance of writing and erasing processes in phase-change memory devices. Activation energies of observed heat effects were estimated using Kissinger’s method, and nature of endothermic peak was discussed..
Keywords
Phase-change memory, Chalcogenide alloys, Phase transformations, Differential scanning calorimetry.
Submitted at: Oct. 23, 2008
Accepted at: Jan. 29, 2009
Citation
A. A. SHERCHENKOV, S. A. KOZYUKHIN, E.V. GORSHKOVA, Transformations in phase-change memory material during thermal cycling, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 1, pp. 26-33 (2009)
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