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Two-dimensional inductively coupled argon plasma simulations with experimental verification

WEN-FENG ZHAO1,* , ZHOU YANG1, JUN-FANG CHEN2

Affiliation

  1. College of Engineering, south china agricultural university, Guangzhou, 510642, People’s Republic of China
  2. School of Physics and Telecommunication Engineering, Laboratory of Quantum Information Technology, South China Normal University, Guangzhou, China, 510006, People’s Republic of China

Abstract

A two-dimensional model has been developed for simulating the behavior of inductively coupled plasma torches by using customized computational fluid dynamic (CFD) commercial CFDRC software. Both Ar+ (the argon ion) and Ar* (the metastable argon atomic) distributions in inductively coupled plasma are presented from this simple model. The optical emission spectroscopy and Langmuir probe are applied to analyze the characteristic of Ar plasma and verify the model. The results show that the predictions seem to be reasonable fundamentally and are similar with Optical Emission Spectroscopy and Langmuir probe observation in some aspects including the Ar* distributions and flow vortexes influence. Due to the model contains several simplification, some differences appear by mean of comparing calculated with measured Ar+ distributions..

Keywords

Inductively coupled plasma; Emission spectroscopy; Single Langmuir probe; Simulation.

Submitted at: July 20, 2012
Accepted at: Sept. 20, 2012

Citation

WEN-FENG ZHAO, ZHOU YANG, JUN-FANG CHEN, Two-dimensional inductively coupled argon plasma simulations with experimental verification, Journal of Optoelectronics and Advanced Materials Vol. 14, Iss. 9-10, pp. 792-797 (2012)