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Zinc oxide thin films prepared by spray pyrolysis

A. TECARU1, A.-I. DANCIU1, V. MUŞAT1,* , E. FORTUNATO2, E. ELANGOVAN2

Affiliation

  1. Centre of Nanostructures and Functional Materials-CNMF, Dunărea de Jos University of Galaţi, 111 Domnească Street, 800201, Galaţi, Romania
  2. Materials Science Department, CENIMAT/I3N and CEMOP/UNINOVA, FCT-UNL, Campus de Caparica, 2829-516 Caparica, Portugal

Abstract

The paper presents intrinsic and Al or In-doped ZnO thin films deposited on glass substrates (5x5 cm2 ) by spray pyrolysis technique, at 400-450 0 C, using zinc acetate as precursor, acetic acid and water /methanol as solvent. The prepared thin films, with thickness ranging from 60 to 350 nm, show TCO properties with n-type conductivity and optical transmittance between 80-90%..

Keywords

Spray pyrolysis, Zinc oxide, Thin films, Transparent conductive oxide.

Submitted at: July 30, 2010
Accepted at: Sept. 15, 2010

Citation

A. TECARU, A.-I. DANCIU, V. MUŞAT, E. FORTUNATO, E. ELANGOVAN, Zinc oxide thin films prepared by spray pyrolysis, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 9, pp. 1889-1893 (2010)