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Zn1-xMgxO thin films deposited by original infrared assisted spray chemical vapor deposition: evaluation of structural, optical and electrical properties with the aim of provide Cu(In,Ga)Se2 based photovoltaic devices

V. FROGER1,* , S. DABOS-SEIGNON2, S. NOËL3, D. CHAPRON4, A. BOUTEVILLE1

Affiliation

  1. LAMPA / ECPS, Arts & Métiers ParisTech, 2 boulevard du Ronceray, 49035 ANGERS, France
  2. LUNAM Université, Université d’Angers, CNRS UMR 6200, Laboratoire MOLTECH-Anjou, 2 bd Lavoisier, 49045 Angers cedex, France
  3. DTNM / LCRE, CEA Grenoble, 17 rue des Martyrs, 38054 GRENOBLE, France
  4. LMOPS, Université de Lorraine, Supélec, EA 4423, Metz, F- 57070, France

Abstract

In this work, magnesium doped zinc oxide (Zn1-xMgxO) thin films were deposited using an original infrared assisted Spray Chemical Vapor Deposition (Spray-CVD) technique on borosilicate glass substrates. With a simple, safe and cost-effective apparatus, Zn1-xMgxO thin films was studied in a range of 0 to 40% in precursor mass ratio r = [Mg]/([Zn]+[Mg]). The optimal deposition temperature was 500°C. X-ray diffraction analysis confirmed the presence of magnesium in the hexagonal Wurtzite crystal lattice of zinc oxide for r values lower than 30%. The optical properties have been investigated by spectrophotometry and showed that the transparency is higher than 80% in the visible and infrared spectral domain for r values lower than 20%. The band gap energy increased from 3.28 to 3.94 eV (0 < r < 40%), and the resistivity of the samples increased from 4.16×10-2 to 7.09×10+3 Ω.cm (Hall effect measurement). Additional characterizations have been realized by X-ray fluorescence (XRF) and energy dispersive X-ray spectrometry (EDX). All results demonstrate that Zn1-xMgxO thin films with r = 20% obtained by our Spray-CVD method is an interesting candidate for buffer layer application in Cu(In,Ga)Se2 based solar cells..

Keywords

Magnesium zinc oxide, Transparent conductive material, Buffer layer, Thin film, Spray CVD.

Submitted at: March 6, 2013
Accepted at: May 15, 2014

Citation

V. FROGER, S. DABOS-SEIGNON, S. NOËL, D. CHAPRON, A. BOUTEVILLE, Zn1-xMgxO thin films deposited by original infrared assisted spray chemical vapor deposition: evaluation of structural, optical and electrical properties with the aim of provide Cu(In,Ga)Se2 based photovoltaic devices, Journal of Optoelectronics and Advanced Materials Vol. 16, Iss. 5-6, pp. 697-704 (2014)